Jul 20, 2019  
2012-2013 General Catalog 
    
2012-2013 General Catalog [ARCHIVED CATALOG]

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EE 7244 Advanced Lithography and Metrology (3)


Prereq.: EE 7240  or consent of instructor. Physical principles used in state-of-the-art microlithography; optical systems, x-rays, e-beams, resists, measurement and inspection techniques.



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