Jul 20, 2019  
2012-2013 General Catalog 
    
2012-2013 General Catalog [ARCHIVED CATALOG]

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EE 7246 Integrated Sensors and Actuators (3)


Prereq.: EE 7240  and EE 4242  or consent of instructor. Sensor principles and design considerations; bulk and surface micromachining fabrication technologies including LIGA; microactuators and microelectromechanical devices; integration of sensors/actuators and electrical circuitry on the same chip.



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